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High-precision position control of a gene sequencer motion stage 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2455-2462
Authors:  Fu, Yun-Bo;  Guo, Tong-Jian
Adobe PDF(854Kb)  |  Favorite  |  View/Download:233/118  |  Submit date:2019/09/17
Controllers  Computer control systems  Equations of motion  Frequency domain analysis  Genes  Permanent magnets  Position control  Synchronous motors  
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
Authors:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
Adobe PDF(3436Kb)  |  Favorite  |  View/Download:269/71  |  Submit date:2018/06/13
基于双频激光干涉仪的精密定位系统设计 期刊论文
实验室研究与探索, 2016, 期号: 11, 页码: 72-75
Authors:  陈昊;  陈琦;  蒋贵德
caj(227Kb)  |  Favorite  |  View/Download:253/69  |  Submit date:2017/09/17
双频激光干涉仪  气浮导轨  精密定位  前馈控制  
Development of arc-edge tool lapping machine for grating ruling based on leverage load mode 期刊论文
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2016, 卷号: 52, 期号: 9
Authors:  Jirigalantu;  X. Li;  K. Liu;  S. Zhang;  Bayanheshig;  X. Qi and Y. Tang
Adobe PDF(745Kb)  |  Favorite  |  View/Download:186/32  |  Submit date:2017/09/11
基于直线电机驱动气浮导轨的高精度定位平台实现 期刊论文
电子测量技术, 2015, 期号: 12, 页码: 89-91+95
Authors:  姬琪;  王红园
caj(267Kb)  |  Favorite  |  View/Download:235/54  |  Submit date:2016/07/06
直线电机  气浮导轨  定位平台  闭环控制  
大光栅刻划机气浮刀架导轨设计与分析 期刊论文
中国激光, 2015, 期号: 04, 页码: 266-272
Authors:  宋楠;  冯树龙;  于海利;  齐向东;  巴音贺希格;  唐玉国
caj(1313Kb)  |  Favorite  |  View/Download:237/86  |  Submit date:2016/07/06
光栅  衍射光栅  光栅刻划机  气浮导轨  双频激光干涉仪  刀架系统  
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
Authors:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
Adobe PDF(1451Kb)  |  Favorite  |  View/Download:219/23  |  Submit date:2016/08/24
菲索干涉仪移相器关键技术研究 学位论文
: 中国科学院大学, 2015
Authors:  毛石磊
Adobe PDF(3933Kb)  |  Favorite  |  View/Download:198/2  |  Submit date:2016/04/11
菲索干涉仪  移相器  微位移  柔性铰链  压电陶瓷  
基于双频激光干涉仪大载荷纳米微动台的研制 期刊论文
实验室研究与探索, 2014, 期号: 12, 页码: 54-57
Authors:  陈琦;  钟君
caj(165Kb)  |  Favorite  |  View/Download:238/65  |  Submit date:2015/04/17
压电陶瓷  纳米定位  气浮导轨  激光干涉仪  
基于电容微位移传感器的大载荷微动台的研制 期刊论文
应用科技, 2014, 期号: 6
Authors:  陈琦
Unknown(565Kb)  |  Favorite  |  View/Download:201/46  |  Submit date:2015/04/17
纳米定位  压电陶瓷  气浮导轨  电容微位移传感器