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基于双频激光干涉仪大载荷纳米微动台的研制
陈琦; 钟君
2014-12-15
Source Publication实验室研究与探索
Issue12Pages:54-57
Abstract在超精密加工制造等领域,为了满足大质量工件的超精密进给定位应用需求,设计并研制了一种大载荷应用情况下的纳米级精密定位平台。该纳米微动承载台采用双闭式气浮导轨,由压电陶瓷致动器结合柔性铰链提供驱动,通过双频激光干涉仪实时监测终端承载台位移并实现闭环反馈控制,有效地克服了压电陶瓷致动器的非线性和迟滞效应,并消除了系统由于刚度不足而产生的不确定性干扰。在传统纯柔性铰链传动机构上增设了双气浮导轨承载台,增强了系统的载荷能力,气浮均化效应也提高了系统进给运行的直线性,双频激光干涉仪取代电容式或电阻式位移传感器的应用,从理论上扩展了行程,保证了平台进给的定位精度和长期稳定性。实验结果表明,在载荷为100 kg情况下,定位精度达±2 nm,行程大于10μm。
Keyword压电陶瓷 纳米定位 气浮导轨 激光干涉仪
Language中文
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/43543
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
陈琦,钟君. 基于双频激光干涉仪大载荷纳米微动台的研制[J]. 实验室研究与探索,2014(12):54-57.
APA 陈琦,&钟君.(2014).基于双频激光干涉仪大载荷纳米微动台的研制.实验室研究与探索(12),54-57.
MLA 陈琦,et al."基于双频激光干涉仪大载荷纳米微动台的研制".实验室研究与探索 .12(2014):54-57.
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