Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine

	Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine
	Song, N.; S. Feng; H. Yu; X. Qi; Bayanheshig and Y. Tang
	2015
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	42 期号:4
摘要	We have attempt to use aerostatic guideway to load the diamond carriage system in large diffraction grating ruling engine. Aerostatic guideway undertakes the task of bearing and guiding the diamond carriage system simultaneously. Applying air as lubricant, the friction of aerostatic guideway is approach to zero and can avoid the wear and creeping phenomenon. The motion error of the aerostatic guideway as well as the error's influence on the diamond carriage system are analyzed. The linear movement accuracy of diamond carriage system during the ruling process is measured with a dual-frequency laser interferometer. The results show that the linear accuracy is about 200 nm on 400 mm one-way trip, less than using quartz guide. Besides, there is a significant improvement in high frequency vibration. An echelle grating with 79 gr/mm and 400 mm500 mm area has been ruled by this system. The grating's diffraction spot is displayed and its stray light intensity varies from 0.2 to 5 in different positions, examining with an illuminometer. The results show that the aerostatic guideway can satisfy the requirements of grating ruling. , 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56378
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song, N.,S. Feng,H. Yu,et al. Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(4).
APA	Song, N.,S. Feng,H. Yu,X. Qi,&Bayanheshig and Y. Tang.(2015).Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine.Zhongguo Jiguang/Chinese Journal of Lasers,42(4).
MLA	Song, N.,et al."Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine".Zhongguo Jiguang/Chinese Journal of Lasers 42.4(2015).

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