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中国科学院长春光学精密机械与物理研究所
Changchun Institute of Optics,Fine Mechanics and Physics,CAS
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Numerical simulation of ultrasonic enhancement by acoustic streaming and thermal effect on mass transfer through a new computation model
期刊论文
International Journal of Heat and Mass Transfer, 2021, 卷号: 171
Authors:
X. Chen
;
Bayanheshig
;
Q. Jiao
;
X. Tan and W. Wang
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Adobe PDF(2106Kb)
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View/Download:16/0
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Submit date:2022/06/13
Grating-based precision measurement system for five-dimensional measurement
期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202
Authors:
Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li
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View/Download:30/1
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Submit date:2021/07/06
Heterodyne period measurement in a scanning beam interference lithography system
期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836
Authors:
S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
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View/Download:22/3
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Submit date:2021/07/06
The effects of TMDD-PA concentration on roughness of Si <1 1 0> and etching rate ratio of Si <1 1 0>/<1 1 1> in alkaline KOH solution
期刊论文
Chemical Physics, 2020, 卷号: 529, 页码: 4
Authors:
C. L. Zhu,Q. B. Jiao,X. Tan,H. Hu and Bayanheshig
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View/Download:22/2
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Submit date:2021/07/06
In-situ monitoring of metal depositing in the fabrication of metallic grating
期刊论文
Chinese Optics, 2019, 卷号: 12, 期号: 3, 页码: 606-615
Authors:
C.-L.Zhu
;
H.Hu
;
Q.-B.Jiao
;
X.Tan
;
Bayanheshig
caj(5217Kb)
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View/Download:78/17
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Submit date:2020/08/24
Monitoring,Current density,Deposition,Diffraction efficiency,Diffraction gratings,Fabrication,Metals,Energy dissipation,Photoresistors
Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
期刊论文
Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355
Authors:
Y.Song
;
Bayanheshig
;
S.Li
;
S.Jiang
;
W.Wang
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Adobe PDF(3307Kb)
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View/Download:66/11
  |  
Submit date:2020/08/24
Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics
Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer
期刊论文
Applied Optics, 2019, 卷号: 58, 期号: 12, 页码: 3193-3199
Authors:
Q.Lv
;
Z.W.Liu
;
W.Wang
;
S.Jiang
;
Bayanheshig
;
W.H.Li
View
  |  
Adobe PDF(1371Kb)
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View/Download:38/3
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Submit date:2020/08/24
heterodyne interferometer,laser,encoder,Optics
Design of near-Infrared reconfigurable metalens on Silicon-On-Insulator (SOI) platform with FabryPerrot phase shifter
期刊论文
Optics Communications, 2019, 卷号: 446, 页码: 56-63
Authors:
R.-Q.Gao
;
Q.Song
;
H.Liu
;
J.-B.Gao
;
X.-Y.Wang
;
Bayanheshig
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Adobe PDF(2482Kb)
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View/Download:37/7
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Submit date:2020/08/24
Infrared devices,Efficiency,Fluorescence microscopy,Lenses,Metals,Optical radar
Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization
期刊论文
Applied Optics, 2019, 卷号: 58, 期号: 15, 页码: 4052-4058
Authors:
C.L.Zhu
;
Q.B.Jiao
;
X.Tan
;
W.Wang
;
Bayanheshig
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Adobe PDF(1536Kb)
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View/Download:34/3
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Submit date:2020/08/24
Optics
Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement
期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 31, 页码: 9455-9463
Authors:
Lv, Qiang
;
Liu, Zhaowu
;
Wang, Wei
;
Li, Xiaotian
;
Li, Shuo
;
Song, Ying
;
Yu, Hongzhu
;
Bayanheshig
;
Li, Wenhao
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Adobe PDF(1611Kb)
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View/Download:220/61
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Submit date:2019/08/26
laser
nonlinearity
encoder
errors
stage
Optics