Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront

	Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront
	Mi, X.; H. Yu; H. Yu; X. Qi; X. Li and Q. Wan
	2017
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	44 期号:9
摘要	Diffracted wavefront quality is one of the important performance indexes of gratings. If there is Abbe error in the grating ruling engine, it will directly affect the positioning accuracy of grooves, thus affecting wavefront quality of gratings. The physical models of the Abbe error and the quality of the grating diffraction wave are established, to analyze the influence of the error on the wavefront quality. Aiming at the Abbe error, a kind of measurement optical path is designed based on dual-frequency laser interferometry, and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated. Furthermore, the error control method based on double-layer grating table structure is proposed. Before and after revising Abbe error, the ruling experiments for two echelle gratings with the size of 80 mm100 mm and groove density of 79 groove/mm are carried out. The results show that the diffracted wavefront error of the gratings in-36 blaze order is reduced from 0.529 to 0.159 (=632.8 nm) by the measurement and correction of the Abbe error, which effectively reduces the influence of Abbe error on the quality of grating's diffracted wavefront. 2017, Chinese Lasers Press. All right reserved.
收录类别	ei
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59138
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Mi, X.,H. Yu,H. Yu,et al. Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2017,44(9).
APA	Mi, X.,H. Yu,H. Yu,X. Qi,&X. Li and Q. Wan.(2017).Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront.Zhongguo Jiguang/Chinese Journal of Lasers,44(9).
MLA	Mi, X.,et al."Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront".Zhongguo Jiguang/Chinese Journal of Lasers 44.9(2017).

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