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Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 31, 页码: 9455-9463
Authors:  Lv, Qiang;  Liu, Zhaowu;  Wang, Wei;  Li, Xiaotian;  Li, Shuo;  Song, Ying;  Yu, Hongzhu;  Bayanheshig;  Li, Wenhao
View  |  Adobe PDF(1611Kb)  |  Favorite  |  View/Download:35/10  |  Submit date:2019/08/26
laser  nonlinearity  encoder  errors  stage  Optics  
极紫外宽带多层膜反射镜离散化膜系的设计与制备 期刊论文
光学精密工程, 2018, 期号: 10, 页码: 2395-2406
Authors:  匡尚奇;  李硕;  杨海贵;  霍同林;  周洪军
Favorite  |  View/Download:9/0  |  Submit date:2019/09/17
多层膜设计  极紫外  离散化设计  宽带多层膜  
大面积狭缝式涂布工作台的设计与分析 期刊论文
制造业自动化, 2018, 期号: 05, 页码: 126-128
Authors:  李烁
Favorite  |  View/Download:7/0  |  Submit date:2019/09/17
狭缝式涂布  大面积  模态分析  
基于量子遗传算法的宽带离散化极紫外多层膜的研制 期刊论文
光子学报, 2018, 期号: 04, 页码: 52-60
Authors:  匡尚奇;  张超;  李硕;  杨海贵;  霍同林;  周洪军
Favorite  |  View/Download:8/0  |  Submit date:2019/09/17
光学多层膜  膜系设计  量子遗传算法  宽带极紫外多层膜  离散化设计  
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
Authors:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
View  |  Adobe PDF(985Kb)  |  Favorite  |  View/Download:11/4  |  Submit date:2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm 期刊论文
Guangzi Xuebao/Acta Photonica Sinica, 2018, 卷号: 47, 期号: 4
Authors:  Kuang, Shang-Qi;  Zhang, Chao;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
View  |  Adobe PDF(1699Kb)  |  Favorite  |  View/Download:18/7  |  Submit date:2019/09/17
Quantum theory  Fabrication  Genetic algorithms  Magnetron sputtering  Multilayers  Reflection