CIOMP OpenIR
极紫外宽带多层膜反射镜离散化膜系的设计与制备
匡尚奇; 李硕; 杨海贵; 霍同林; 周洪军
2018
Source Publication光学精密工程
Issue10Pages:2395-2406
Abstract极紫外(EUV)宽带多层膜的光谱性能对膜厚控制精度要求较高,仅由时间控制膜厚的镀膜系统难以满足其精度控制要求。本文提出了基于进化算法的宽带EUV多层膜离散化膜系设计方法,与传统膜系设计相比,离散化膜系所制备多层膜具有更为优良的EUV反射光谱性能。为验证离散化膜系设计在宽带EUV多层膜研制中的优越性,采用磁控溅射方法对具有离散化膜系的宽带多层膜反射镜进行了制备和测试。测试结果表明:研制的宽角度多层膜反射镜可实现入射角带宽为0°~17°,高于41%的反射率;研制的堆栈宽角度多层膜反射镜可实现入射角带宽为0°~18.5°,高于35%的反射率;研制的宽光谱多层膜反射镜可实现波长带宽为12.9~14.9 nm,高于21%的反射率。
Keyword多层膜设计 极紫外 离散化设计 宽带多层膜
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/61408
Collection中国科学院长春光学精密机械与物理研究所
Recommended Citation
GB/T 7714
匡尚奇,李硕,杨海贵,等. 极紫外宽带多层膜反射镜离散化膜系的设计与制备[J]. 光学精密工程,2018(10):2395-2406.
APA 匡尚奇,李硕,杨海贵,霍同林,&周洪军.(2018).极紫外宽带多层膜反射镜离散化膜系的设计与制备.光学精密工程(10),2395-2406.
MLA 匡尚奇,et al."极紫外宽带多层膜反射镜离散化膜系的设计与制备".光学精密工程 .10(2018):2395-2406.
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