Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses

doi:10.3788/OPE.20182610.2395

CIOMP OpenIR

	Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses
	Kuang, Shang-Qi; Li, Shuo; Yang, Hai-Gui; Huo, Tong-Lin; Zhou, Hong-Jun
	2018
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	26 期号:10 页码:2395-2406
摘要	Efficient broadband reflective Extreme Ultraviolet (EUV) multilayers require superior control and precision of layer thickness. A solely time-controlled deposition system can not meet the requirements of high accuracy. In this paper, we present a scheme for the design of broadband multilayers with discrete thicknesses based on an evolutionary algorithm. This method greatly improves the reflectivity curve compared to that of conventional multilayer mirrors without discrete thicknesses. To verify the superiority of the design, the broadband multilayers were deposited using a magnetron sputtering system. The EUV measurements reveal that the deposited aperiodic broad angular multilayers exhibits reflectivity values greater than 41% over an angle of incidence range of 0-17 for a fixed wavelength of 13.5 nm, the broad angular multilayers in four different stacks exhibits reflectivity values greater than 35% with a wide angular bandpass over an angle of incidence range of 0-18.5 for a fixed wavelength of 13.5 nm, and the broadband multilayer mirrors exhibits reflectivity values greater than 21% for wavelengths ranging between 12.9-14.9 nm for a fixed angle of incidence of 3. This study demonstrates a great potential for the application of discrete design in the fabrication of EUV broadband multilayers with high accuracy. 2018, Science Press. All right reserved.
关键词	Multilayers Extreme ultraviolet lithography Fabrication Mirrors Reflection
DOI	10.3788/OPE.20182610.2395
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60608
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Kuang, Shang-Qi,Li, Shuo,Yang, Hai-Gui,et al. Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2018,26(10):2395-2406.
APA	Kuang, Shang-Qi,Li, Shuo,Yang, Hai-Gui,Huo, Tong-Lin,&Zhou, Hong-Jun.(2018).Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,26(10),2395-2406.
MLA	Kuang, Shang-Qi,et al."Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 26.10(2018):2395-2406.

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