Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement

doi:10.1364/AO.57.009455

CIOMP OpenIR

	Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement
	Lv, Qiang 1,2; Liu, Zhaowu 1; Wang, Wei 1; Li, Xiaotian 1; Li, Shuo 1; Song, Ying 1; Yu, Hongzhu 1; Bayanheshig 1; Li, Wenhao 1
	2018-11-01
发表期刊	APPLIED OPTICS
ISSN	1559-128X
卷号	57 期号:31 页码:9455-9463
通讯作者	Li, Wenhao(liwh@ciomp.ac.cn)
摘要	We propose a simple and compact reading head with the Littrow configuration that will increase measurement range and reduce the complexity of a two-dimensional grating-based interferometer. The reading head contains only a beam splitter, two polarizing beam splitter modules, and two mirrors. The theoretical resolutions in two directions are 0.27 nm and 0.18 nm, respectively. In comparison with a dual-frequency laser interferometer, the proposed interferometer can measure displacement from 3 nm to 10 mm with high accuracy. The 3 sigma values in two directions for the difference are 1.67 nm and 1.35 nm for a displacement of 9 nm. Repeatability for a displacement of 1 mu m is better than 2 nm. (C) 2018 Optical Society of America
关键词	laser nonlinearity encoder errors stage Optics
DOI	10.1364/AO.57.009455
关键词[WOS]	LASER ; NONLINEARITY ; ENCODER ; ERRORS ; STAGE
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China (NSFC)[61227901] ; National Natural Science Foundation of China (NSFC)[61741517] ; Jilin Province Science & Technology Development Program Project in China[20180201035GX] ; Jilin Province Special Funds for High-tech Industrialization ; Chinese Academy of Sciences (CAS)[2018SYHZ0014]
项目资助者	National Natural Science Foundation of China (NSFC) ; Jilin Province Science & Technology Development Program Project in China ; Jilin Province Special Funds for High-tech Industrialization ; Chinese Academy of Sciences (CAS)
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000448953800036
出版者	OPTICAL SOC AMER
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60384
专题	中国科学院长春光学精密机械与物理研究所
通讯作者	Li, Wenhao
作者单位	1.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Lv, Qiang,Liu, Zhaowu,Wang, Wei,et al. Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement[J]. APPLIED OPTICS,2018,57(31):9455-9463.
APA	Lv, Qiang.,Liu, Zhaowu.,Wang, Wei.,Li, Xiaotian.,Li, Shuo.,...&Li, Wenhao.(2018).Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement.APPLIED OPTICS,57(31),9455-9463.
MLA	Lv, Qiang,et al."Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement".APPLIED OPTICS 57.31(2018):9455-9463.

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