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揭秘“精密机械之王” 期刊论文
中国基础科学, 2018, 期号: 02, 页码: 48-52+62
Authors:  唐玉国;  巴音贺希格;  竺长安;  金一
Favorite  |  View/Download:17/0  |  Submit date:2019/09/17
大面积光栅  刻划光栅  光栅刻划机  超精密制造  
Trajectory-fitting and testing error analysis of stage for curved grating etching 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 3, 页码: 588-596
Authors:  Shen, Chen;  Tan, Xin;  Zhu, Ji-Wei;  Zhang, Wei;  Qi, Xiang-Dong
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Curve fitting  Diffraction gratings  Errors  Etching  
大型高精度衍射光栅刻划机分度系统重载工作台的宏定位实现方法研究 学位论文
博士, 中国科学院大学(中国科学院长春光学精密机械与物理研究所): 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2018
Authors:  姚雪峰
caj(23894Kb)  |  Favorite  |  View/Download:5/0  |  Submit date:2019/09/23
光栅刻划机  机刻光栅  研磨加工  传动精度测量  宏微双重驱动  
大型衍射光栅刻划机微定位系统控制器设计及光栅衍射波前校正技术研究 学位论文
博士, 中国科学院大学(中国科学院长春光学精密机械与物理研究所): 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2018
Authors:  糜小涛
caj(5660Kb)  |  Favorite  |  View/Download:10/0  |  Submit date:2019/09/23
衍射光栅  光栅刻划机  微定位系统  控制器设计  刻线误差  测量系统  余弦误差  阿贝误差  大气折射率  衍射波前  基底面形误差  镀膜均匀性  
A Detection System Design of Echelle Diffraction Efficiency and Stray Coefficient 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 8
Authors:  Shen, C. Y.;  J. C. Cui;  C. Sun;  W. Wang;  J. J. Chen and X. T. Li
Adobe PDF(549Kb)  |  Favorite  |  View/Download:49/8  |  Submit date:2018/06/13
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
Authors:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
Adobe PDF(3436Kb)  |  Favorite  |  View/Download:48/10  |  Submit date:2018/06/13
光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法 期刊论文
中国激光, 2017, 页码: 148-156
Authors:  糜小涛;  于海利;  于宏柱;  齐向东;  李晓天;  万秋华
caj(3271Kb)  |  Favorite  |  View/Download:77/16  |  Submit date:2018/04/09
衍射光栅  阿贝误差  衍射波前  刻线位置误差  刻划机  
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
Authors:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
Adobe PDF(4373Kb)  |  Favorite  |  View/Download:38/4  |  Submit date:2018/06/13
基底温度对中阶梯光栅厚铝膜质量的影响 期刊论文
中国光学, 2016, 期号: 6, 页码: 656-662
Authors:  孙梦至;  高劲松;  李资政;  杨海贵;  王笑夷
caj(258Kb)  |  Favorite  |  View/Download:49/16  |  Submit date:2017/09/17
中阶梯光栅  厚铝膜  基底温度  
Development and error compensation of the high precision turntable 期刊论文
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2016, 卷号: 37, 期号: 5
Authors:  Yao, X.;  C. Sun;  J. Yang;  L. Yin and H. Zhao
Adobe PDF(1139Kb)  |  Favorite  |  View/Download:36/3  |  Submit date:2017/09/11