Trajectory-fitting and testing error analysis of stage for curved grating etching

doi:10.3788/OPE.20182603.0588

CIOMP OpenIR

	Trajectory-fitting and testing error analysis of stage for curved grating etching
	Shen, Chen; Tan, Xin; Zhu, Ji-Wei; Zhang, Wei; Qi, Xiang-Dong
	2018
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	26 期号:3 页码:588-596
摘要	To manufacture curved surface gratings with highly consistent blazing angles, the curve-fitting motion of the three-dimensional (3D) stage is essential. Therefore, an investigation of the 3D stage was performed based on a control algorithm for the curved blazed grating etching system. First, a concept of the 3D stage of the curved blazed grating etching system was introduced. Subsequently, according to the actual requirement of the etching machine, the theoretical calculating method for the track of the stage was provided. Then, the arc-fitting algorithm of the stage was proposed and the curve-fitting motion of the stage was performed. Finally, the actual motion tracks of the 3D stage were measured and compared with ideal tracks. Experimental results demonstrate that the cumulative positioning error of the linear fitting motion of the stage after 15 cycles is less than 0.218 mm, and the slope angle error is less than 0.02; the cumulative positioning error of the curve fitting motion of the stage after 40 cycles is less than 0.2 mm and the rotating angle error is in the range of -0.2-0.1. This method has realized the function of scanning etching and oscillating etching of the 3D stage. The stability, accuracy, and interference rejection of the stage satisfy the processing requirements. 2018, Science Press. All right reserved.
关键词	Curve fitting Diffraction gratings Errors Etching
DOI	10.3788/OPE.20182603.0588
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60844
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Shen, Chen,Tan, Xin,Zhu, Ji-Wei,et al. Trajectory-fitting and testing error analysis of stage for curved grating etching[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2018,26(3):588-596.
APA	Shen, Chen,Tan, Xin,Zhu, Ji-Wei,Zhang, Wei,&Qi, Xiang-Dong.(2018).Trajectory-fitting and testing error analysis of stage for curved grating etching.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,26(3),588-596.
MLA	Shen, Chen,et al."Trajectory-fitting and testing error analysis of stage for curved grating etching".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 26.3(2018):588-596.

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