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| Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者: Mi, X.; H. Yu; H. Yu; X. Qi; X. Li and Q. Wan
浏览  |   Adobe PDF(3436Kb)  |   收藏  |  浏览/下载:351/125  |  提交时间:2018/06/13 |
| Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7 作者: Wang, W.; Bayanheshig; M. Pan; Y. Song and W. Li
浏览  |   Adobe PDF(993Kb)  |   收藏  |  浏览/下载:285/89  |  提交时间:2018/06/13 |
| Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者: Wang, W.; S. Jiang; Y. Song and Bayanheshig
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| Precision analysis of grating replicated mosaic error based on the principle of fraunhofer 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5 作者: Lu, Y.; X. Qi; H. Yu; X. Li; S. Zhang; S. Jiang and L. Yin
浏览  |   Adobe PDF(1613Kb)  |   收藏  |  浏览/下载:328/111  |  提交时间:2017/09/11 |
| Detection and calculation of mosaic grating error based on wavefront method 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 5 作者: Lu, Y.; X. Qi; X. Mi; S. Jiang; H. Yu; X. Li and L. Yin
浏览  |   Adobe PDF(590Kb)  |   收藏  |  浏览/下载:316/83  |  提交时间:2017/09/11 |
| Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12 作者: Wang, W.; Bayanheshig; Y. Song; S. Jiang and M. Pan
浏览  |   Adobe PDF(1920Kb)  |   收藏  |  浏览/下载:468/86  |  提交时间:2017/09/11 |
| 光栅刻划机衍射波前质量的主动控制校正方法 期刊论文 中国激光, 2015, 期号: 01, 页码: 239-246 作者: 杨超; 于海利; 张善文; 于宏柱; 李晓天; 唐玉国
caj(1321Kb)  |   收藏  |  浏览/下载:353/126  |  提交时间:2016/07/06 光栅 刻划光栅 光栅波前 刻线位置误差 转角误差 压电驱动器 |
| Active control technology to correct the quality of the grating wave-front 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 1 作者: Yang, C.; H. Yu; S. Zhang; H. Yu; X. Li and Y. Tang
浏览  |   Adobe PDF(1479Kb)  |   收藏  |  浏览/下载:377/116  |  提交时间:2016/08/24 |
| Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4 作者: Song, N.; S. Feng; H. Yu; X. Qi; Bayanheshig and Y. Tang
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| Design of a varied-line-space plane grating in EUV spectrum 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2015, 卷号: 35, 期号: 1 作者: Jiang, Y.; Bayanheshig; S. Yang; X. Zhao; W. Li and N. Wu
浏览  |   Adobe PDF(1560Kb)  |   收藏  |  浏览/下载:397/117  |  提交时间:2016/08/24 |