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Active control technology to correct the quality of the grating wave-front
Yang, C.; H. Yu; S. Zhang; H. Yu; X. Li and Y. Tang
2015
发表期刊Zhongguo Jiguang/Chinese Journal of Lasers
卷号42期号:1
摘要Diffracted wave-front quality is one of the most important performance indexs for ruled gratings. For mechanically ruled gratings, positioning accuracy of the groove directly affects the wave-front quality of the gratings. The mathematical relationship between the inherent errors of the ruling machine which including the error of groove position, error of yaw and wave-front error of the gratings is developed, and the impact of various errors on the wave-front quality is analyzed. According to the error of groove position and error of yaw, a measure optical path is designed based on double-frequency laser interference, and a method to correct the error of groove position and error of yaw is proposed using piezoelectric actuator. According to the correction method, a double workbench is designed, and the ruling experiments for the size of 80 mm60 mm and groove density of 194 line/mm are carried out. The results show that the diffracted wave-front error of the ruled grating is reduced from 0.23 to 0.093 (=632.8 nm), and testing quality of the groove by atomic force microscope meets the requirement of the theoretical design. , 2014, Science Press. All right reserved.
文章类型期刊论文
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/56390
专题中科院长春光机所知识产出
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Yang, C.,H. Yu,S. Zhang,et al. Active control technology to correct the quality of the grating wave-front[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(1).
APA Yang, C.,H. Yu,S. Zhang,H. Yu,&X. Li and Y. Tang.(2015).Active control technology to correct the quality of the grating wave-front.Zhongguo Jiguang/Chinese Journal of Lasers,42(1).
MLA Yang, C.,et al."Active control technology to correct the quality of the grating wave-front".Zhongguo Jiguang/Chinese Journal of Lasers 42.1(2015).
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