Design of a varied-line-space plane grating in EUV spectrum

	Design of a varied-line-space plane grating in EUV spectrum
	Jiang, Y.; Bayanheshig; S. Yang; X. Zhao; W. Li and N. Wu
	2015
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	35 期号:1
摘要	To make varied-line-space holographic grating which in applied in the extreme ultraviolet band (50~ 150 nm), a new optimization algorithm applied to spherical wavefront system is proposed, named the improved local optimization algorithm. According to the request of instruments, expected varied-line-space holographic grating density function is built. Based on this density function, the merit function is given, of which characteristic is transforming four merit functions to one merit function which has multivariate and nonlinear constrains. Using the improved local algorithm, the error of groove density coefficient is reduced and the resolution of gratings is improved due to the weighted, the diversity of the initial value, the limitation of the recording parameters values range and the constraint of groove density coefficients. Compared with the conventional local optimization algorithm, using the improved local optimization algorithm makes absolute error between design and expected groove density in 0~0.02 line/mm range. And the order of magnitude is improved and the resolution increases from 4000 to above 17000. Results show that by adopting the suited optimization algorithm, varied-line-space plane grating with a high resolution can be made in the spherical wavefront system. , 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56167
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jiang, Y.,Bayanheshig,S. Yang,et al. Design of a varied-line-space plane grating in EUV spectrum[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(1).
APA	Jiang, Y.,Bayanheshig,S. Yang,X. Zhao,&W. Li and N. Wu.(2015).Design of a varied-line-space plane grating in EUV spectrum.Guangxue Xuebao/Acta Optica Sinica,35(1).
MLA	Jiang, Y.,et al."Design of a varied-line-space plane grating in EUV spectrum".Guangxue Xuebao/Acta Optica Sinica 35.1(2015).

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极紫外波段平面变栅距全息光栅的优化设计_（1560KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载