Precision analysis of grating replicated mosaic error based on the principle of fraunhofer

	Precision analysis of grating replicated mosaic error based on the principle of fraunhofer
	Lu, Y.; X. Qi; H. Yu; X. Li; S. Zhang; S. Jiang and L. Yin
	2016
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	43 期号:5
摘要	Mosaic grating is one of the most important methods for fabricating large-size plane diffraction gratings, and mosaic error is an important index to evaluate whether the mosaic grating can be used. Therefore, the real-time quantitative measurement of mosaic error can realize automatic closed-loop adjustment and improve the accuracy of mosaic grating fabrication. The mathematical model of the diffraction wavefront and the mosaic error of the grating is established and the mosaic error is analyzed. The diffraction wavefront of the mosaic grating at the zeroth-order and the negative first-order is extracted quantitatively by using a ZYGO interferometer. The numerical solution of five dimensional error is calculated by analyzing the mosaic error wavefront, and its accuracy is verified by the negative second-order diffraction wavefront. The experimental results show that the mosaic error of the gratings at the zeroth-order, the negative first-order and the negative second-order is consistent with each other, which provides theoretical guidance for measuring mosaic error by wavefront and realizing automatic closed-loop adjustment. 2016, Chinese Lasers Press. All right reserved.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57119
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lu, Y.,X. Qi,H. Yu,et al. Precision analysis of grating replicated mosaic error based on the principle of fraunhofer[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2016,43(5).
APA	Lu, Y.,X. Qi,H. Yu,X. Li,S. Zhang,&S. Jiang and L. Yin.(2016).Precision analysis of grating replicated mosaic error based on the principle of fraunhofer.Zhongguo Jiguang/Chinese Journal of Lasers,43(5).
MLA	Lu, Y.,et al."Precision analysis of grating replicated mosaic error based on the principle of fraunhofer".Zhongguo Jiguang/Chinese Journal of Lasers 43.5(2016).

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