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Measurement System Design of Spatial Position Accuracy of Dynamic Targets 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2021, 卷号: 48, 期号: 13
作者:  L. Yang and N. Zhang
浏览  |  Adobe PDF(4248Kb)  |  收藏  |  浏览/下载：115/51  |  提交时间：2022/06/13
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：340/118  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：271/80  |  提交时间：2018/06/13
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载：411/77  |  提交时间：2017/09/11
Angle error investigation in laser tracker testing large aspheric mirrors 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 11
作者:  Liu, L.;  X. Chen;  L. Xiong;  F. Zhang and D. Xue
浏览  |  Adobe PDF(567Kb)  |  收藏  |  浏览/下载：331/90  |  提交时间：2017/09/11
High-resolution imaging by Bi-linear CCD shifting sampling 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 9
作者:  Xu, S.;  C. Chen;  B. Sun;  X. Zhang and J. Ren
浏览  |  Adobe PDF(1611Kb)  |  收藏  |  浏览/下载：366/104  |  提交时间：2016/08/24
Active control technology to correct the quality of the grating wave-front 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 1
作者:  Yang, C.;  H. Yu;  S. Zhang;  H. Yu;  X. Li and Y. Tang
浏览  |  Adobe PDF(1479Kb)  |  收藏  |  浏览/下载：356/105  |  提交时间：2016/08/24
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
作者:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
浏览  |  Adobe PDF(1451Kb)  |  收藏  |  浏览/下载：331/67  |  提交时间：2016/08/24