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Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 2
作者:  Yang, J.;  R. Zhang;  L. Yin;  C. Sun and T. J. Li
浏览  |  Adobe PDF(1770Kb)  |  收藏  |  浏览/下载：275/80  |  提交时间：2018/06/13
Beam drift error and control technology for scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 14
作者:  Wang, W.;  Y. Song;  S. Jiang;  M. Z. Pan and Bayanheshing
浏览  |  Adobe PDF(1710Kb)  |  收藏  |  浏览/下载：263/74  |  提交时间：2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载：292/104  |  提交时间：2018/06/13
Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 31
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song;  X. T. Li;  S. Jiang and N. Wu
浏览  |  Adobe PDF(1191Kb)  |  收藏  |  浏览/下载：299/68  |  提交时间：2017/09/11
Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Y. X.;  X. D. Qi;  X. T. Li;  H. L. Yu;  S. Jiang;  H. Bayan and L. Yin
浏览  |  Adobe PDF(749Kb)  |  收藏  |  浏览/下载：293/65  |  提交时间：2017/09/11
Ruling of echelles and gratings with a diamond tool by the torque equilibrium method 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Jirigalantu;  X. T. Li;  S. W. Zhang;  X. T. Mi;  J. X. Gao;  Bayanheshig;  X. D. Qi and Y. G. Tang
浏览  |  Adobe PDF(1388Kb)  |  收藏  |  浏览/下载：366/73  |  提交时间：2017/09/11
High-accuracy spectral reduction algorithm for the echelle spectrometer 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 13
作者:  Yin, L.;  Bayanheshig;  J. Yang;  Y. X. Lu;  R. Zhang;  C. Sun and J. C. Cui
浏览  |  Adobe PDF(834Kb)  |  收藏  |  浏览/下载：325/83  |  提交时间：2017/09/11
Design, fabrication, and verification of a three-dimensional autocollimator 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 35
作者:  Yin, Y. H.;  S. Cai and Y. F. Qiao
浏览  |  Adobe PDF(899Kb)  |  收藏  |  浏览/下载：360/87  |  提交时间：2017/09/11
Wavelength calibration model for prism-type echelle spectrometer by reversely solving prism's refractive index in real time 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 15
作者:  Zhang, R.;  Bayanheshig;  L. Yin;  X. T. Li;  J. C. Cui;  J. Yang and C. Sun
浏览  |  Adobe PDF(804Kb)  |  收藏  |  浏览/下载：281/65  |  提交时间：2017/09/11
Real-time monitoring of ruling grating resolution by digital wavefront 期刊论文
Applied Optics, 2015, 卷号: 54, 期号: 3, 页码: 492-497
作者:  Yang, C.;  H. L. Yu;  X. T. Li;  J. C. Cui;  Bayanheshig;  X. D. Qi and Y. G. Tang
浏览  |  Adobe PDF(539Kb)  |  收藏  |  浏览/下载：277/99  |  提交时间：2016/07/15