Design, fabrication, and verification of a three-dimensional autocollimator

	Design, fabrication, and verification of a three-dimensional autocollimator
	Yin, Y. H.; S. Cai and Y. F. Qiao
	2016
发表期刊	Applied Optics
卷号	55 期号:35
摘要	During the ion beam figuring (IBF) of a space mirror, thermal radiation of the neutral filament and particle collisions will heat the mirror. The adhesive layer used to bond the metal parts and the mirror is very sensitive to temperature rise. When the temperature exceeds the designed value, the mirror surface shape will change markedly because of the thermal deformation and stress release of the adhesive layer, thereby reducing the IBF accuracy. To suppress the thermal effect, we analyzed the heat generation mechanism. By using thermal radiation theory, we established a thermal radiation model of the neutral filament. Additionally, we acquired a surface-type Gaussian heat source model of the ion beam sputtering based on the removal function and Faraday scan result. Using the finite-element-method software ABAQUS, we developed a method that can simulate the thermal effect of the IBF for the full path and all dwell times. Based on the thermal model, which was experimentally confirmed, we simulated the thermal effects for a 675 mm x 374 mm rectangular SiC space mirror. By optimizing the dwell time distribution, the peak temperature value of the adhesive layer during the figuring process was reduced under the designed value. After one round of figuring, the RMS value of the surface error changed from 0.094 to 0.015. (lambda = 632.8 nm), which proved the effectiveness of the thermal analysis and suppression method. (C) 2016 Optical Society of America
文章类型	期刊
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57373
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yin, Y. H.,S. Cai and Y. F. Qiao. Design, fabrication, and verification of a three-dimensional autocollimator[J]. Applied Optics,2016,55(35).
APA	Yin, Y. H.,&S. Cai and Y. F. Qiao.(2016).Design, fabrication, and verification of a three-dimensional autocollimator.Applied Optics,55(35).
MLA	Yin, Y. H.,et al."Design, fabrication, and verification of a three-dimensional autocollimator".Applied Optics 55.35(2016).

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