Real-time monitoring of ruling grating resolution by digital wavefront

	Real-time monitoring of ruling grating resolution by digital wavefront
	Yang, C.; H. L. Yu; X. T. Li; J. C. Cui; Bayanheshig; X. D. Qi and Y. G. Tang
	2015
发表期刊	Applied Optics
卷号	54 期号:3 页码:492-497
摘要	In order to solve the problem that the grating quality cannot be monitored directly in real time, we provided a method based on Rayleigh criterion with our designing optical measurement structure to measure yaw and displacement errors of a grating ruling machine feeding system. Gratings are ruled with or without errors correction by the real-time monitoring system. It shows that the resolution obtained without errors correction is reduced from 99.97% to 87.47% of theoretical value, while the resolution obtained with errors correction is stable, remaining at 99.99%-97.21%. The experimental result is that the grating quality can be guaranteed by monitoring grating resolution in real time. (C) 2015 Optical Society of America.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55391
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang, C.,H. L. Yu,X. T. Li,et al. Real-time monitoring of ruling grating resolution by digital wavefront[J]. Applied Optics,2015,54(3):492-497.
APA	Yang, C.,H. L. Yu,X. T. Li,J. C. Cui,Bayanheshig,&X. D. Qi and Y. G. Tang.(2015).Real-time monitoring of ruling grating resolution by digital wavefront.Applied Optics,54(3),492-497.
MLA	Yang, C.,et al."Real-time monitoring of ruling grating resolution by digital wavefront".Applied Optics 54.3(2015):492-497.

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