Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis

	Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis
	Zhao, X. L.; Bayanheshig; W. H. Li; Y. X. Jiang; Y. Song; X. T. Li; S. Jiang and N. Wu
	2016
发表期刊	Applied Optics
卷号	55 期号:31
摘要	To meet the required manufacturing accuracy of high-quality aberration-corrected holographic gratings, we propose a moire alignment algorithm for the exposure system of holographic gratings. A model holographic grating exposure system is built with multiple degrees of freedom based on optical path function theory. The whole process algorithm is then derived, including the fourth-order orthogonal polynomial of the holographic gratings, fitted aberration coefficients, and an optimized Levenberg-Marquardt algorithm for the exposure system's recording parameters. Finally, the simulated alignment and error analysis of a 2400 gr/mm aberration-corrected holographic grating's exposure system are presented. The proposed moire alignment algorithm for such exposure systems can effectively improve the alignment accuracy, ensuring better holographic grating aberration correction ability. (C) 2016 Optical Society of America
文章类型	期刊
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57476
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao, X. L.,Bayanheshig,W. H. Li,et al. Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis[J]. Applied Optics,2016,55(31).
APA	Zhao, X. L..,Bayanheshig.,W. H. Li.,Y. X. Jiang.,Y. Song.,...&S. Jiang and N. Wu.(2016).Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis.Applied Optics,55(31).
MLA	Zhao, X. L.,et al."Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis".Applied Optics 55.31(2016).

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