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Accurate measurement and adjustment method for interference fringe direction in a scanning beam interference lithography system 期刊论文
Optics Express, 2023, 卷号: 31, 期号: 17, 页码: 28145-28160
作者:  Y. Li;  S. Jiang;  X. Chen;  Z. Liu;  W. Wang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(3467Kb)  |  收藏  |  浏览/下载：37/9  |  提交时间：2024/07/03
Grating-based precision measurement system for five-dimensional measurement 期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202
作者:  Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li
浏览  |  Adobe PDF(3195Kb)  |  收藏  |  浏览/下载：203/85  |  提交时间：2021/07/06
Heterodyne period measurement in a scanning beam interference lithography system 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836
作者:  S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
浏览  |  Adobe PDF(1356Kb)  |  收藏  |  浏览/下载：310/57  |  提交时间：2021/07/06
Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：389/133  |  提交时间：2018/06/13
Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang
浏览  |  Adobe PDF(1461Kb)  |  收藏  |  浏览/下载：279/83  |  提交时间：2018/06/13
Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li
浏览  |  Adobe PDF(993Kb)  |  收藏  |  浏览/下载：316/109  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：329/117  |  提交时间：2018/06/13
Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文
Scientific Reports, 2017, 卷号: 7
作者:  Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang;  Y. Song and Q. Lv
浏览  |  Adobe PDF(4562Kb)  |  收藏  |  浏览/下载：303/135  |  提交时间：2018/06/13
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
浏览  |  Adobe PDF(3322Kb)  |  收藏  |  浏览/下载：343/109  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：352/121  |  提交时间：2018/06/13