Heterodyne period measurement in a scanning beam interference lithography system

doi:10.1364/ao.393865

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	Heterodyne period measurement in a scanning beam interference lithography system
	S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
	2020
发表期刊	Applied Optics
ISSN	1559-128X
卷号	59 期号:19 页码:5830-5836
摘要	The interference fringe period is an important phase-locking parameter in the scanning beam interference lithography (SBIL) system. To measure the interference fringe period accurately, a heterodyne period measurement method is proposed. Compared with traditional methods, the requirements for the stage motion characteristics are greatly reduced. In this paper, the theoretical error of the period measurement method is analyzed and relevant experiments are performed. The results show that the average period measurement value is 555.539 nm and the standard deviation of measurement repeatability is 2.5 pm. This method is significant for holographic grating fabrication using the SBIL system. (C) 2020 Optical Society of America
DOI	10.1364/ao.393865
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64549
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig. Heterodyne period measurement in a scanning beam interference lithography system[J]. Applied Optics,2020,59(19):5830-5836.
APA	S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig.(2020).Heterodyne period measurement in a scanning beam interference lithography system.Applied Optics,59(19),5830-5836.
MLA	S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig."Heterodyne period measurement in a scanning beam interference lithography system".Applied Optics 59.19(2020):5830-5836.

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