Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances

	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
	Liu, Z. W.; W. H. Li; Bayanheshig; X. T. Li; S. Jiang; Y. Song and Q. Lv
	2017
发表期刊	Scientific Reports
卷号	7
摘要	We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 x 10(-8).
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59111
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu, Z. W.,W. H. Li,Bayanheshig,et al. Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances[J]. Scientific Reports,2017,7.
APA	Liu, Z. W.,W. H. Li,Bayanheshig,X. T. Li,S. Jiang,&Y. Song and Q. Lv.(2017).Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances.Scientific Reports,7.
MLA	Liu, Z. W.,et al."Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances".Scientific Reports 7(2017).

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