Grating-based precision measurement system for five-dimensional measurement

doi:10.3788/CO.20201301.0189

CIOMP OpenIR

	Grating-based precision measurement system for five-dimensional measurement
	Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li
	2020
发表期刊	Chinese Optics
ISSN	20951531
卷号	13 期号:1 页码:189-202
摘要	To realize large range, high precision and multi-dimensional measurement with a relatively simple structure, a grating-based precise measurement system is designed for five-dimensional measurement including simultaneous measurement of displacement and angle. Based on symmetrical Littrow structure and heterodyne interference principle, two-dimensional displacement measurement along grating's vector direction and normal direction is realized by using one-dimensional diffraction grating with high groove density. What's more, the angle errors of pitch, yaw and roll of grating are measured by using high precision position sensitive detectors considering the angular variation between 1st order diffraction light and grating. Experimental results indicate that the proposed grating-based precision measurement system can achieve high precision and large range displacement measurement with resolution better than 4 nm. It can also realize high precision angle error measurement with resolution better than 1". Moreover, because the displacement measurement range is only limited by the size of grating, its measuring range is greatly increased. The grating-based precision measurement system is very important for high precision measurement of displacement and angle in the field of precision measurement. 2020, China Science Publishing & Media LTD. All right reserved.
DOI	10.3788/CO.20201301.0189
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64546
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li. Grating-based precision measurement system for five-dimensional measurement[J]. Chinese Optics,2020,13(1):189-202.
APA	Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li.(2020).Grating-based precision measurement system for five-dimensional measurement.Chinese Optics,13(1),189-202.
MLA	Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li."Grating-based precision measurement system for five-dimensional measurement".Chinese Optics 13.1(2020):189-202.

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