Weighted iterative algorithm for beam alignment in scanning beam interference lithography

	Weighted iterative algorithm for beam alignment in scanning beam interference lithography
	Song, Y.; W. Wang; S. Jiang; Bayanheshig and N. Zhang
	2017
发表期刊	Applied Optics
卷号	56 期号:31
摘要	To obtain low phase errors and good interference fringe contrast, an automated beam alignment system is used in scanning beam interference lithography. In the original iterative algorithm, if the initial beam deviation is large or the optical parameters are inappropriate, the beam angle (or position) overshoot may exceed the detector's range. To solve this problem, a weighted iterative algorithm is proposed in which the beam angle and position overshoots can be suppressed by adjusting the weighting coefficients. The original iterative algorithm is introduced. The weighted iterative algorithm is then presented and its convergence is analyzed. Simulation and experimental results show that the proposed weighted iterative algorithm can reduce the beam angle and position overshoots at the expense of convergence speed, avoiding the alignment failure caused by exceeding the detector's range. Besides, the original and weighted iterative algorithms can be combined to optimize the iteration. (C) 2017 Optical Society of America
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59196
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song, Y.,W. Wang,S. Jiang,et al. Weighted iterative algorithm for beam alignment in scanning beam interference lithography[J]. Applied Optics,2017,56(31).
APA	Song, Y.,W. Wang,S. Jiang,&Bayanheshig and N. Zhang.(2017).Weighted iterative algorithm for beam alignment in scanning beam interference lithography.Applied Optics,56(31).
MLA	Song, Y.,et al."Weighted iterative algorithm for beam alignment in scanning beam interference lithography".Applied Optics 56.31(2017).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Weighted iterative a（1461KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载