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High-precision displacement measurement algorithm based on a depth fusion of grating projection pattern 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 4, 页码: 1049-1056
作者:  H. Yu;  Q. H. Wan;  X. R. Lu;  Y. C. Du and L. H. Liang
浏览  |  Adobe PDF(6289Kb)  |  收藏  |  浏览/下载:139/60  |  提交时间:2023/06/14
Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 16, 页码: 4557-4566
作者:  Y. Wu;  L. Wang;  X. Zhang;  J. Yu;  B. Yu and C. Jin
浏览  |  Adobe PDF(8010Kb)  |  收藏  |  浏览/下载:145/45  |  提交时间:2022/06/13
Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 32, 页码: 10185-10193
作者:  Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
Adobe PDF(4372Kb)  |  收藏  |  浏览/下载:168/74  |  提交时间:2021/07/06
Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 27, 页码: 8465-8471
作者:  X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun
Adobe PDF(2466Kb)  |  收藏  |  浏览/下载:135/58  |  提交时间:2021/07/06
Active lens for thermal aberration compensation in lithography lens 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 29, 页码: 8654-8663
作者:  Zhao, L.;  Dong, L. J.;  Yu, X. F.;  Li, P. Z.;  Qiao, Y. F.
Adobe PDF(2985Kb)  |  收藏  |  浏览/下载:370/111  |  提交时间:2019/09/17
adaptive optics  deformable mirror  performance  simulation  systems  design  Optics  
Speckle pattern sequential extraction metric for estimating the focus spot size on a remote diffuse target 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 32
作者:  Yu, Z.;  Y. Y. Li;  L. S. Liu;  J. Guo;  T. F. Wang and G. Q. Yang
Adobe PDF(1473Kb)  |  收藏  |  浏览/下载:307/91  |  提交时间:2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
Adobe PDF(1006Kb)  |  收藏  |  浏览/下载:297/106  |  提交时间:2018/06/13
Field experiment and image reconstruction using a Fourier telescopy imaging system over a 600-m-long horizontal path 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 24
作者:  Yu, S. H.;  L. Dong;  X. Y. Liu;  X. D. Lin;  H. R. Megn and X. Zhong
Adobe PDF(2995Kb)  |  收藏  |  浏览/下载:284/58  |  提交时间:2017/09/11
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig;  H. Z. Yu;  H. L. Yu and Q. B. Jiao
浏览  |  Adobe PDF(1214Kb)  |  收藏  |  浏览/下载:304/64  |  提交时间:2017/09/11
Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Y. X.;  X. D. Qi;  X. T. Li;  H. L. Yu;  S. Jiang;  H. Bayan and L. Yin
浏览  |  Adobe PDF(749Kb)  |  收藏  |  浏览/下载:295/66  |  提交时间:2017/09/11