Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront

doi:10.1364/ao.399147

CIOMP OpenIR

	Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront
	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun
	2020
发表期刊	Applied Optics
ISSN	1559-128X
卷号	59 期号:27 页码:8465-8471
摘要	Measuring mirror requirements and their impact on groove errors are related to the error compensation strategy for a ruling engine. We analyze why the measuring mirror of the CIOMP-6 engine affects the groove straightness and the grating diffraction wavefront. We study a theoretical model of the relationship between the measuring mirror's surface shape error and the grating wavefront, propose a requirement for the measuring mirror surface shape error, and reprocess the measuring mirror. Comparative ruling experiments prove that the grating's wavefront quality at the diffraction order along the groove direction improved significantly after reprocessing of the measuring mirror. (C) 2020 Optical Society of America
DOI	10.1364/ao.399147
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64474
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun. Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront[J]. Applied Optics,2020,59(27):8465-8471.
APA	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun.(2020).Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront.Applied Optics,59(27),8465-8471.
MLA	X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun."Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront".Applied Optics 59.27(2020):8465-8471.

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