Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control

doi:10.1364/AO.427713

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	Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control
	Y. Wu; L. Wang; X. Zhang; J. Yu; B. Yu and C. Jin
	2021
发表期刊	Applied Optics
ISSN	1559128X
卷号	60 期号:16 页码:4557-4566
摘要	This paper proposes a design method for an off-axis reflective anamorphic optical system (ORAOS). This method first applies vector aberration theory to establish a mathematical model to balance the aberration of an ORAOS. It then builds the error function of structural parameters and constraints through spatial ray tracing and grouping design. Next, it introduces automatic adjustment of weight factors for dynamic balance of aberrations and constraints. A particle swarm simulated annealing algorithm is used to iteratively calculate the initial structure of the ORAOS. Finally, we use an extreme ultraviolet (EUV) lithographic projection objective with off-axis six-reflective anamorphic mirrors (x D1=4; y D1=8) as an example to verify the effectiveness of this method.We obtain an EUV lithographic anamorphic objective with a numerical aperture of 0.55 and a root mean square wavefront error better than 1=30 (OI13.5 nm). 2021 Optical Society of America.
DOI	10.1364/AO.427713
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65148
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wu,L. Wang,X. Zhang,et al. Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control[J]. Applied Optics,2021,60(16):4557-4566.
APA	Y. Wu,L. Wang,X. Zhang,J. Yu,&B. Yu and C. Jin.(2021).Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control.Applied Optics,60(16),4557-4566.
MLA	Y. Wu,et al."Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control".Applied Optics 60.16(2021):4557-4566.

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