Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view

doi:10.1364/ao.409561

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	Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view
	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
	2020
发表期刊	Applied Optics
ISSN	1559-128X
卷号	59 期号:32 页码:10185-10193
摘要	This paper proposes a grouping design method based on a combination of spatial ray tracing and aberration correction to construct the initial structure for an off-axis multi-reflective aspheric optical system. This method establishes a mathematical parameter model of the optical system to satisfy the aberration balance and multi-constraint control requirements. The simulated annealing particle swarm algorithm is applied to calculate the initial optical system structure. Finally, an extreme ultraviolet (EUV) lithography projection objective with six-reflective aspheric mirrors is used as an example to verify the reliability and effectiveness of this method. A 0.33 numerical aperture EUV lithographic objective with wavefront error better than 1/70 lambda(lambda = 13.5 nm) root mean square (RMS) is obtained. (C) 2020 Optical Society of America
DOI	10.1364/ao.409561
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64414
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin. Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view[J]. Applied Optics,2020,59(32):10185-10193.
APA	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin.(2020).Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view.Applied Optics,59(32),10185-10193.
MLA	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin."Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view".Applied Optics 59.32(2020):10185-10193.

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