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40x zoom optical system design based on stable imaging principle of four groups 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 6, 页码: 1516-1522
作者:  K. Zhang;  Z. Qu;  X. Zhong;  F. X. Li and S. Y. Yu
浏览  |  Adobe PDF(8534Kb)  |  收藏  |  浏览/下载:134/55  |  提交时间:2023/06/14
Apparatus and its principle for thermal aberration compensation 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 29, 页码: 8624-8632
作者:  X. F. Yu;  H. J. Yang and M. Y. Ni
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High-precision displacement measurement algorithm based on a depth fusion of grating projection pattern 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 4, 页码: 1049-1056
作者:  H. Yu;  Q. H. Wan;  X. R. Lu;  Y. C. Du and L. H. Liang
浏览  |  Adobe PDF(6289Kb)  |  收藏  |  浏览/下载:149/63  |  提交时间:2023/06/14
Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 16, 页码: 4557-4566
作者:  Y. Wu;  L. Wang;  X. Zhang;  J. Yu;  B. Yu and C. Jin
浏览  |  Adobe PDF(8010Kb)  |  收藏  |  浏览/下载:163/48  |  提交时间:2022/06/13
Anti-stain algorithm of angular displacement based on a single image sensor 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 7, 页码: 1985-1990
作者:  H. Yu, Q. H. Wan, C. H. Zhao, X. R. Lu and Y. Sun
浏览  |  Adobe PDF(824Kb)  |  收藏  |  浏览/下载:165/58  |  提交时间:2021/07/06
Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 32, 页码: 10185-10193
作者:  Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
Adobe PDF(4372Kb)  |  收藏  |  浏览/下载:178/78  |  提交时间:2021/07/06
Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 27, 页码: 8465-8471
作者:  X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun
Adobe PDF(2466Kb)  |  收藏  |  浏览/下载:142/62  |  提交时间:2021/07/06
Active lens for thermal aberration compensation in lithography lens 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 29, 页码: 8654-8663
作者:  Zhao, L.;  Dong, L. J.;  Yu, X. F.;  Li, P. Z.;  Qiao, Y. F.
Adobe PDF(2985Kb)  |  收藏  |  浏览/下载:387/113  |  提交时间:2019/09/17
adaptive optics  deformable mirror  performance  simulation  systems  design  Optics  
Speckle pattern sequential extraction metric for estimating the focus spot size on a remote diffuse target 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 32
作者:  Yu, Z.;  Y. Y. Li;  L. S. Liu;  J. Guo;  T. F. Wang and G. Q. Yang
浏览  |  Adobe PDF(1473Kb)  |  收藏  |  浏览/下载:308/92  |  提交时间:2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载:299/107  |  提交时间:2018/06/13