Apparatus and its principle for thermal aberration compensation

doi:10.1364/ao.464483

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	Apparatus and its principle for thermal aberration compensation
	X. F. Yu; H. J. Yang and M. Y. Ni
	2022
发表期刊	Applied Optics
ISSN	1559-128X
卷号	61 期号:29 页码:8624-8632
摘要	Thermal aberrations caused by absorption of laser beams degrade the image quality of exposure tools during the working process. Many compensators, such as lens movement or lens deformation, are used to compensate for low -order thermal aberrations of optical systems. In this paper, an apparatus with higher-order aberration correction capability is presented. The main principle of the apparatus is to actively heat and cool the lens near the pupil to generate a desired temperature profile to compensate for thermal aberrations. We first introduce the basic concept of the apparatus. Then we establish an analytical model to describe the lens temperature of the apparatus based on its working principle and demonstrate its compensation capability. Finally, an algorithm for dynamic thermal aberrations compensation is proposed to overcome the time lag effects of a thermally controlled lens. (c) 2022 Optica Publishing Group
DOI	10.1364/ao.464483
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收录类别	sci ; ei
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66421
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. F. Yu,H. J. Yang and M. Y. Ni. Apparatus and its principle for thermal aberration compensation[J]. Applied Optics,2022,61(29):8624-8632.
APA	X. F. Yu,&H. J. Yang and M. Y. Ni.(2022).Apparatus and its principle for thermal aberration compensation.Applied Optics,61(29),8624-8632.
MLA	X. F. Yu,et al."Apparatus and its principle for thermal aberration compensation".Applied Optics 61.29(2022):8624-8632.

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