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Accurate measurement and adjustment method for interference fringe direction in a scanning beam interference lithography system 期刊论文
Optics Express, 2023, 卷号: 31, 期号: 17, 页码: 28145-28160
作者:  Y. Li;  S. Jiang;  X. Chen;  Z. Liu;  W. Wang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(3467Kb)  |  收藏  |  浏览/下载：37/9  |  提交时间：2024/07/03
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
浏览  |  Adobe PDF(12024Kb)  |  收藏  |  浏览/下载：110/44  |  提交时间：2023/06/14
Numerical simulation of ultrasonic enhancement by acoustic streaming and thermal effect on mass transfer through a new computation model 期刊论文
International Journal of Heat and Mass Transfer, 2021, 卷号: 171
作者:  X. Chen;  Bayanheshig;  Q. Jiao;  X. Tan and W. Wang
浏览  |  Adobe PDF(2106Kb)  |  收藏  |  浏览/下载：229/67  |  提交时间：2022/06/13
Grating-based precision measurement system for five-dimensional measurement 期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202
作者:  Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li
浏览  |  Adobe PDF(3195Kb)  |  收藏  |  浏览/下载：203/85  |  提交时间：2021/07/06
Heterodyne period measurement in a scanning beam interference lithography system 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836
作者:  S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
浏览  |  Adobe PDF(1356Kb)  |  收藏  |  浏览/下载：310/57  |  提交时间：2021/07/06
Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang
浏览  |  Adobe PDF(1461Kb)  |  收藏  |  浏览/下载：279/83  |  提交时间：2018/06/13
Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li
浏览  |  Adobe PDF(993Kb)  |  收藏  |  浏览/下载：316/109  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：329/117  |  提交时间：2018/06/13
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载：631/110  |  提交时间：2017/09/11
Tunable spatial heterodyne spectroscopy with grating-mirror structure 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 卷号: 23, 期号: 12, 页码: 3295-3302
作者:  Bayanheshig;  T.-T. Li;  M.-Z. Pan;  J.-C. Cui;  W. Wang and X.-T. Li
caj(475Kb)  |  收藏  |  浏览/下载：307/67  |  提交时间：2016/08/24