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Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
Adobe PDF(867Kb)  |  收藏  |  浏览/下载:314/100  |  提交时间:2018/06/13
Measurement of Far-ultraviolet BRDF for Solar Diffuser 期刊论文
Guangzi Xuebao/Acta Photonica Sinica, 2017, 卷号: 46, 期号: 9
作者:  Han, G.;  G.-Y. Lin;  L.-Q. Wang;  B. Li and D.-S. Cao
Adobe PDF(1360Kb)  |  收藏  |  浏览/下载:291/116  |  提交时间:2018/06/13
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
Adobe PDF(947Kb)  |  收藏  |  浏览/下载:341/89  |  提交时间:2018/06/13
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 6
作者:  Zhang, C.;  J. Zhang;  Y. Wang;  S. Kuang and Y. Xie
Adobe PDF(1065Kb)  |  收藏  |  浏览/下载:315/89  |  提交时间:2018/06/13
Meter-scale thin film coating equipment based on meniscus-coating technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 1
作者:  Xu, J.;  W.-B. Xu;  H.-Y. Bu;  Z.-W. Lu;  Z.-K. Liu;  Y.-L. Hong and W.-X. Yu
Adobe PDF(611Kb)  |  收藏  |  浏览/下载:314/111  |  提交时间:2018/06/13
Surface modification of 2 m RB-SiC substrate by magnetron sputtering 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 7
作者:  Liu, Z.;  J.-S. Gao;  H. Liu;  X.-Y. Wang and T.-T. Wang
浏览  |  Adobe PDF(1031Kb)  |  收藏  |  浏览/下载:290/89  |  提交时间:2017/09/11
Effect and experiment analysis of first specular reflection error on absolute radiometers 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 4
作者:  Tang, X.;  W. Fang and Y. Wang
浏览  |  Adobe PDF(1257Kb)  |  收藏  |  浏览/下载:328/96  |  提交时间:2017/09/11
Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 4
作者:  Yu, B.;  C. Li;  C. Jin and C. Wang
浏览  |  Adobe PDF(1342Kb)  |  收藏  |  浏览/下载:338/68  |  提交时间:2017/09/11
大面积高质量中阶梯光栅厚铝膜特性和制备工艺研究 学位论文
: 中国科学院大学, 2015
作者:  孙梦至
Adobe PDF(3757Kb)  |  收藏  |  浏览/下载:303/3  |  提交时间:2016/04/11
中阶梯光栅  高质量铝膜  大面积均匀性  多步沉积  
新型MoO3电致变色薄膜的制备及性能研究 学位论文
: 中国科学院大学, 2015
作者:  刘岩
Adobe PDF(5005Kb)  |  收藏  |  浏览/下载:556/3  |  提交时间:2016/04/11
电致变色  透明导电膜  柔性  介质/金属/介质  Moo3/ag/moo3  无ito  稳定性