Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system

	Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system
	Yu, B.; C. Li; C. Jin and C. Wang
	2016
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	43 期号:4
摘要	The autocollimator is an optical instrument for noncontact angle measurement with high resolution and a long detection range. It measures two-dimensional angles, i. e., pitch and yaw, but not roll. In this paper, we present a novelly structured autocollimator capable of measuring three-dimensional (3D) angles simultaneously. In this setup, two collimated beams of different wavelengths are projected onto a right-angle prism. One beam is reflected by the hypotenuse of the prism and received by an autocollimation unit for detecting pitch and yaw. The other is reflected by the two legs of the right-angle prism and received by a moire fringe imaging unit for detecting roll. Furthermore, a prototype is designed and fabricated. Experiments are carried out to evaluate its basic performance. Calibration results show that this prototype has angular RMS errors of less than 5 arcsec in all 3Ds over a range of 1000 arcsec at a working distance of 2 m. (C) 2016 Optical Society of America.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57374
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yu, B.,C. Li,C. Jin and C. Wang. Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2016,43(4).
APA	Yu, B.,C. Li,&C. Jin and C. Wang.(2016).Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system.Zhongguo Jiguang/Chinese Journal of Lasers,43(4).
MLA	Yu, B.,et al."Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system".Zhongguo Jiguang/Chinese Journal of Lasers 43.4(2016).

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