Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer

	Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer
	Kuang, S.-Q.; C. Zhang; Y.-M. Wang; X.-Y. Zhou and Y. Xie
	2017
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	25 期号:8
摘要	In order to further improve the efficiency and accuracy of quantum evolutionary algorithm (QEA) in the design of broadband Extreme Ultraviolet (EUV) multilayers, the gradient information of evaluation function was applied to improve QEA, and then the improved quantum evolutionary algorithm (IQEA) with defined evolution directions was adopted in the design of broadband multilayers. A comparison between the QEA and IQEA in the design of broadband Mo/Si multilayer was given, and the results show that the IQEA has better efficiencies and higher accuracies. Furthermore, the IQEA can be used to design the multilayer with a population which is smaller than the number of parameters of Mo/Si multilayer. In this research, two kinds of multilayers were designed based on the IQEA, one has a reflectivity of 50% in the incidence angle range from 0 to 18, and the other allows a reflectivity of 25% in the wavelength range from 13 nm to 15 nm. The theoretical coating designs of broadband EUV multilayers based on IQEA can be an alternative and optimal method for the design of complex non-periodic multilayers. 2017, Science Press. All right reserved.
收录类别	ei
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/58979
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Kuang, S.-Q.,C. Zhang,Y.-M. Wang,et al. Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(8).
APA	Kuang, S.-Q.,C. Zhang,Y.-M. Wang,&X.-Y. Zhou and Y. Xie.(2017).Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(8).
MLA	Kuang, S.-Q.,et al."Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.8(2017).

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