Surface modification of 2 m RB-SiC substrate by magnetron sputtering

	Surface modification of 2 m RB-SiC substrate by magnetron sputtering
	Liu, Z.; J.-S. Gao; H. Liu; X.-Y. Wang and T.-T. Wang
	2016
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	24 期号:7
摘要	Concave grating spectrometer based on Dyson concentric optical system has advantages of low aberration, large aperture and compact structure. The object plane and image plane of concentric spectrometer subsystem must be reunited into one plane while the distance between the object point and image point is relatively small. Thus it is difficult to satisfy this requirement for the existing focal plane of detection technology and assembly technology. In order to solve the assembly problem of the object and detector, the traditional Dyson concentric spectrometer was improved by introducing the off-axis mirror to shift the image light beam. The results show that the object plane and image plane of the improved system are separated successfully by the beam folding, and the aberration at all wavelengths is more rational distribution.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57102
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu, Z.,J.-S. Gao,H. Liu,et al. Surface modification of 2 m RB-SiC substrate by magnetron sputtering[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(7).
APA	Liu, Z.,J.-S. Gao,H. Liu,&X.-Y. Wang and T.-T. Wang.(2016).Surface modification of 2 m RB-SiC substrate by magnetron sputtering.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(7).
MLA	Liu, Z.,et al."Surface modification of 2 m RB-SiC substrate by magnetron sputtering".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.7(2016).

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