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The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
浏览  |  Adobe PDF(1078Kb)  |  收藏  |  浏览/下载：287/100  |  提交时间：2019/09/17
Surface roughness  Silicon echelle grating  Ultrasonic agitation  Surfactant additive  extreme-ultraviolet  si  agitation  alcohol  Acoustics  Chemistry  
A general method of designing phase-shifting algorithms for grating lateral shearing interferometry 期刊论文
Frontiers of Information Technology & Electronic Engineering, 2018, 卷号: 19, 期号: 6, 页码: 809-814
作者:  Fang, C.;  Xiang, Y.;  Qi, K. Q.
浏览  |  Adobe PDF(421Kb)  |  收藏  |  浏览/下载：324/103  |  提交时间：2019/09/17
Interferometry  Phase measurement  Phase-shifting algorithms  point-diffraction interferometer  wave-front reconstruction  hartmann-shack sensor  spatial-resolution  metrology  optics  euva  Computer Science  Engineering  
Two Methods of Amplification of Coherent Extreme Ultraviolet Radiation During Harmonic Generation in Plasmas 期刊论文
Optics and Spectroscopy, 2018, 卷号: 124, 期号: 6, 页码: 855-870
作者:  Ganeev, R. A.
浏览  |  Adobe PDF(1477Kb)  |  收藏  |  浏览/下载：349/137  |  提交时间：2019/09/17
high-order harmonics  laser-produced plasma  photoabsorption spectrum  resonance enhancement  femtosecond pulses  ionization  ablation  nm  photoionization  antimony  Optics  Spectroscopy  
Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm 期刊论文
Optics Communications, 2018, 卷号: 410, 页码: 805-810
作者:  Kuang, S. Q.;  Gong, X. P.;  Yang, H. G.
浏览  |  Adobe PDF(1788Kb)  |  收藏  |  浏览/下载：314/114  |  提交时间：2019/09/17
Multilayers  Multilayer design  X-ray  Soft X-rays  Extreme ultraviolet  Thin films  x-ray  genetic algorithm  mirrors  fabrication  reflectivity  optimization  coatings  Optics  
Active lens for thermal aberration compensation in lithography lens 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 29, 页码: 8654-8663
作者:  Zhao, L.;  Dong, L. J.;  Yu, X. F.;  Li, P. Z.;  Qiao, Y. F.
浏览  |  Adobe PDF(2985Kb)  |  收藏  |  浏览/下载：349/111  |  提交时间：2019/09/17
adaptive optics  deformable mirror  performance  simulation  systems  design  Optics  
Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems 期刊论文
Chinese Optics Letters, 2018, 卷号: 16, 期号: 3, 页码: 5
作者:  Zhou, Z. L.;  Shang, H. B.;  Sui, Y. X.;  Yang, H. J.
浏览  |  Adobe PDF(953Kb)  |  收藏  |  浏览/下载：229/85  |  提交时间：2019/09/17
Optics  
High-performance etching of multilevel phase-type Fresnel zone plates with large apertures 期刊论文
Optics Communications, 2018, 卷号: 407, 页码: 227-233
作者:  Guo, C. L.;  Zhang, Z. Y.;  Xue, D. L.;  Li, L. X.;  Wang, R. Q.;  Zhou, X. G.;  Zhang, F.;  Zhang, X. J.
浏览  |  Adobe PDF(3387Kb)  |  收藏  |  浏览/下载：376/119  |  提交时间：2019/09/17
Fresnel zone plate  Diffractive optical elements  Etching depth  uniformity  Ion beam etching  Dwell time algorithm  dwell-time algorithm  dielectric gratings  fabrication errors  x-ray  ion  Optics  
Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 19, 页码: 25381-25398
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wu, N.;  Bayan, H.;  Qi, X. D.
Adobe PDF(6403Kb)  |  收藏  |  浏览/下载：401/126  |  提交时间：2019/09/17
imaging spectrometer  hyperspectral imager  ultraviolet  algorithm  alignment  design  Optics  
Numerical simulation and design of an apodized diffractive optical element composed of open-ring zones and pinholes 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 1, 页码: 25-32
作者:  Liu, T.;  Wang, L. J.;  Zhang, J. Z.;  Fu, Q.;  Zhang, X.
Adobe PDF(1882Kb)  |  收藏  |  浏览/下载：227/108  |  提交时间：2019/09/17
x-ray microscopy  photon-sieve  resolution  window  plates  Optics