High-performance etching of multilevel phase-type Fresnel zone plates with large apertures

doi:10.1016/j.optcom.2017.09.006

CIOMP OpenIR

	High-performance etching of multilevel phase-type Fresnel zone plates with large apertures
	Guo, C. L.; Zhang, Z. Y.; Xue, D. L.; Li, L. X.; Wang, R. Q.; Zhou, X. G.; Zhang, F.; Zhang, X. J.
	2018
发表期刊	Optics Communications
ISSN	0030-4018
卷号	407 页码:227-233
摘要	To ensure the etching depth uniformity of large-aperture Fresnel zone plates (FZPs) with controllable depths, a combination of a point source ion beam with a dwell-time algorithm has been proposed. According to the obtained distribution of the removal function, the latter can be used to optimize the etching time matrix by minimizing the root-mean-square error between the simulation results and the design value. Owing to the convolution operation in the utilized algorithm, the etching depth error is insensitive to the etching rate fluctuations of the ion beam, thereby reducing the requirement for the etching stability of the ion system. As a result, a 4-level FZP with a circular aperture of 300 mm was fabricated. The obtained results showed that the etching depth uniformity of the full aperture could be reduced to below 1%, which was sufficiently accurate for meeting the use requirements of FZPs. The proposed etching method may serve as an alternative way of etching high-precision diffractive optical elements with large apertures. (C) 2017 Elsevier B.V. All rights reserved.
关键词	Fresnel zone plate Diffractive optical elements Etching depth uniformity Ion beam etching Dwell time algorithm dwell-time algorithm dielectric gratings fabrication errors x-ray ion Optics
DOI	10.1016/j.optcom.2017.09.006
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61020
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Guo, C. L.,Zhang, Z. Y.,Xue, D. L.,et al. High-performance etching of multilevel phase-type Fresnel zone plates with large apertures[J]. Optics Communications,2018,407:227-233.
APA	Guo, C. L..,Zhang, Z. Y..,Xue, D. L..,Li, L. X..,Wang, R. Q..,...&Zhang, X. J..(2018).High-performance etching of multilevel phase-type Fresnel zone plates with large apertures.Optics Communications,407,227-233.
MLA	Guo, C. L.,et al."High-performance etching of multilevel phase-type Fresnel zone plates with large apertures".Optics Communications 407(2018):227-233.

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