A general method of designing phase-shifting algorithms for grating lateral shearing interferometry

doi:10.1631/fitee.1601692

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	A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
	Fang, C.; Xiang, Y.; Qi, K. Q.
	2018
发表期刊	Frontiers of Information Technology & Electronic Engineering
ISSN	2095-9184
卷号	19 期号:6 页码:809-814
摘要	We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.
关键词	Interferometry Phase measurement Phase-shifting algorithms point-diffraction interferometer wave-front reconstruction hartmann-shack sensor spatial-resolution metrology optics euva Computer Science Engineering
DOI	10.1631/fitee.1601692
收录类别	SCI ; EI
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60866
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Fang, C.,Xiang, Y.,Qi, K. Q.. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry[J]. Frontiers of Information Technology & Electronic Engineering,2018,19(6):809-814.
APA	Fang, C.,Xiang, Y.,&Qi, K. Q..(2018).A general method of designing phase-shifting algorithms for grating lateral shearing interferometry.Frontiers of Information Technology & Electronic Engineering,19(6),809-814.
MLA	Fang, C.,et al."A general method of designing phase-shifting algorithms for grating lateral shearing interferometry".Frontiers of Information Technology & Electronic Engineering 19.6(2018):809-814.

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