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Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：334/105  |  提交时间：2018/06/13
Baseline Fitting of Partial Least Squares for Oxygen A Absorption Band 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 8
作者:  Li, J.;  M. Zhang and D. Zhang
浏览  |  Adobe PDF(607Kb)  |  收藏  |  浏览/下载：360/112  |  提交时间：2018/06/13
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：351/125  |  提交时间：2018/06/13
Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载：380/118  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：291/95  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：320/98  |  提交时间：2018/06/13
Precision analysis of grating replicated mosaic error based on the principle of fraunhofer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Lu, Y.;  X. Qi;  H. Yu;  X. Li;  S. Zhang;  S. Jiang and L. Yin
浏览  |  Adobe PDF(1613Kb)  |  收藏  |  浏览/下载：328/111  |  提交时间：2017/09/11
Investigation on pure phase modulation characteristics of liquid crystal spatial light modulator at oblique incidence 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 1
作者:  Lu, Q.;  L. Sheng;  X. Zhang;  J. Bai and Y. Qiao
浏览  |  Adobe PDF(3774Kb)  |  收藏  |  浏览/下载：497/132  |  提交时间：2017/09/11
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载：471/86  |  提交时间：2017/09/11
Angle error investigation in laser tracker testing large aspheric mirrors 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 11
作者:  Liu, L.;  X. Chen;  L. Xiong;  F. Zhang and D. Xue
浏览  |  Adobe PDF(567Kb)  |  收藏  |  浏览/下载：392/100  |  提交时间：2017/09/11