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中国科学院长春光学精密机械与物理研究所
Changchun Institute of Optics,Fine Mechanics and Physics,CAS
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Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems
期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
Authors:
Liu, Z.
;
W. Li
;
Bayanheshig
;
Y. Song
;
S. Jiang
;
X. Li and Q. Lu
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View/Download:360/122
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Submit date:2018/06/13
扫描曝光系统中二维工作台x轴测量镜的面形在线检测
期刊论文
中国激光, 2016, 页码: 231-236
Authors:
刘兆武
;
李文昊
;
巴音贺希格
;
宋莹
;
姜珊
;
李晓天
;
吕强
caj(310Kb)
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View/Download:359/98
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Submit date:2018/04/09
测量
光检测技术
二维工作台
测量镜面形
光栅
激光干涉仪
超光滑光学基底表面原子力显微镜测试方法
期刊论文
中国激光, 2011
Authors:
金春水
;
邓文渊
;
喻波
Adobe PDF(907Kb)
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View/Download:647/248
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Submit date:2012/05/11
无创血糖检测中的近红外血流容积光谱基本问题研究
学位论文
, 北京: 中国科学院研究生院, 2010
Authors:
丁海泉
Adobe PDF(1535Kb)
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Submit date:2013/03/01