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| Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8 作者: Kuang, S.-Q.; C. Zhang; Y.-M. Wang; X.-Y. Zhou and Y. Xie Adobe PDF(867Kb)  |  收藏  |  浏览/下载:309/98  |  提交时间:2018/06/13 |
| Electrostatic field assisted micro imprint lithography technology 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3 作者: Liu, M.-Z.; T.-S. Wang; H.-F. Li; Z.-Y. Liu; Z.-L. Chen and W.-X. Yu Adobe PDF(947Kb)  |  收藏  |  浏览/下载:336/87  |  提交时间:2018/06/13 |
| Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3 作者: Wang, Y.; Q. Lu and Y. Gao 浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载:370/115  |  提交时间:2018/06/13 |
| Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11 作者: Song, Y.; Q.-P. Lu; X.-P. Gong; Y. Wang and Z.-Q. Peng 浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载:313/112  |  提交时间:2018/06/13 |
| Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 6 作者: Zhang, C.; J. Zhang; Y. Wang; S. Kuang and Y. Xie 浏览  |  Adobe PDF(1065Kb)  |  收藏  |  浏览/下载:309/86  |  提交时间:2018/06/13 |
| Image quality evaluation of Wolter X-ray nested telescope 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 3 作者: Zhao, D.; B. Chen; P. Liu and L. He 浏览  |  Adobe PDF(1495Kb)  |  收藏  |  浏览/下载:345/79  |  提交时间:2017/09/11 |
| Optical design of high-numerical aperture lithographic lenses 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4 作者: Xu, M.-F.; W.-B. Pang; X.-R. Xu; X.-H. Wang and W. Huang 浏览  |  Adobe PDF(487Kb)  |  收藏  |  浏览/下载:320/85  |  提交时间:2017/09/11 |
| Measurement of transversal magnification for reduced projection system 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1 作者: Xie, Y.; L.-P. Wang; B.-Y. Guo; J. Wang; L. Miao; H. Wang and F. Zhou 浏览  |  Adobe PDF(645Kb)  |  收藏  |  浏览/下载:323/79  |  提交时间:2017/09/11 |
| Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 4 作者: Yu, B.; C. Li; C. Jin and C. Wang 浏览  |  Adobe PDF(1342Kb)  |  收藏  |  浏览/下载:332/67  |  提交时间:2017/09/11 |
| Measurement of thickness uniformity of optic multilayer based on surface figure measurement 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 7 作者: Wang, H.; F. Zhou; B. Yu; Y. Xie; J. Yu; Y. Liu and L. Wang 浏览  |  Adobe PDF(1398Kb)  |  收藏  |  浏览/下载:317/93  |  提交时间:2016/08/24 |