Measurement of thickness uniformity of optic multilayer based on surface figure measurement

	Measurement of thickness uniformity of optic multilayer based on surface figure measurement
	Wang, H.; F. Zhou; B. Yu; Y. Xie; J. Yu; Y. Liu and L. Wang
	2015
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	42 期号:7
摘要	In order to evaluate the multilayer thickness uniformity of the optics, the measurement method based on optic figure reproducibility metrology is studied. The process of uniformity measurement and the influence factors are analyzed, and the measurement errors due to the reproducibility metrology are evaluated. The finite element analysis (FEA) model of the multilayer is built and the optic figure error due to the inner stress of the multilayer is calculated. The uniformity measurement is carried out on the high reproducibility metrology device, and the results indicate that the multilayer thickness uniformity of the optic in clear aperture is better than 0.1 nm (root mean square). When the results are transformed to thickness profile along the radial points on the optic and compared with the reflectometry test results it is shown that, the uniformity results based on reproducibility metrology are reliable. The experimental results verify the feasibility and the practicability of the measurement method of the multilayer thickness uniformity. , 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56383
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang, H.,F. Zhou,B. Yu,et al. Measurement of thickness uniformity of optic multilayer based on surface figure measurement[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(7).
APA	Wang, H.,F. Zhou,B. Yu,Y. Xie,J. Yu,&Y. Liu and L. Wang.(2015).Measurement of thickness uniformity of optic multilayer based on surface figure measurement.Zhongguo Jiguang/Chinese Journal of Lasers,42(7).
MLA	Wang, H.,et al."Measurement of thickness uniformity of optic multilayer based on surface figure measurement".Zhongguo Jiguang/Chinese Journal of Lasers 42.7(2015).

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