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| Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference 期刊论文 Optics Express, 2022, 卷号: 30, 期号: 23, 页码: 41671-41684 作者: Y. Yin; L. Liu; Y. Bai; Jirigalantu; H. Yu; Bayanheshig; Z. Liu and W. Li 浏览  |  Adobe PDF(5954Kb)  |  收藏  |  浏览/下载:90/43  |  提交时间:2023/06/14 |
| Design of Ultraviolet High-Resolution Astigmatic Correction Rowland Holographic Grating 期刊论文 Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 11 作者: Zhao, X. L.; Bayanheshig; W. H. Li; Y. X. Jiang; N. Wu and T. Zhang 浏览  |  Adobe PDF(1418Kb)  |  收藏  |  浏览/下载:388/120  |  提交时间:2018/06/13 |
| New Measuring Method of Diffraction Efficiency for Concave Grating Based on Fourier Optics Principle 期刊论文 Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 4 作者: Ma, Z. Y.; X. D. Qi; X. T. Li; Bayanheshig; X. F. Yao; Jirigalantu; S. W. Zhang and H. L. Yu 浏览  |  Adobe PDF(809Kb)  |  收藏  |  浏览/下载:382/153  |  提交时间:2018/06/13 |
| Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文 Scientific Reports, 2017, 卷号: 7 作者: Liu, Z. W.; W. H. Li; Bayanheshig; X. T. Li; S. Jiang; Y. Song and Q. Lv 浏览  |  Adobe PDF(4562Kb)  |  收藏  |  浏览/下载:303/135  |  提交时间:2018/06/13 |
| Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文 Optics Express, 2017, 卷号: 25, 期号: 9 作者: Liu, Z. W.; S. Jiang; X. T. Li; Y. Song; W. H. Li and Bayanheshig 浏览  |  Adobe PDF(3322Kb)  |  收藏  |  浏览/下载:343/109  |  提交时间:2018/06/13 |
| Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文 Applied Optics, 2016, 卷号: 55, 期号: 31 作者: Zhao, X. L.; Bayanheshig; W. H. Li; Y. X. Jiang; Y. Song; X. T. Li; S. Jiang and N. Wu 浏览  |  Adobe PDF(1191Kb)  |  收藏  |  浏览/下载:354/94  |  提交时间:2017/09/11 |
| Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文 Applied Optics, 2016, 卷号: 55, 期号: 3 作者: Ma, Z. Y.; X. D. Qi; X. T. Li; S. W. Zhang; Bayanheshig; H. Z. Yu; H. L. Yu and Q. B. Jiao 浏览  |  Adobe PDF(1214Kb)  |  收藏  |  浏览/下载:326/77  |  提交时间:2017/09/11 |
| Study on the Effects and Compensation Effect of Recording Parameters Error on Imaging Performance of Holographic Grating in On-Line Spectral Diagnose 期刊论文 Spectroscopy and Spectral Analysis, 2016, 卷号: 36, 期号: 3 作者: Jiang, Y. X.; Bayanheshig; S. Yang; X. L. Zhao; N. Wu and W. H. Li 浏览  |  Adobe PDF(524Kb)  |  收藏  |  浏览/下载:318/95  |  提交时间:2017/09/11 |
| Practical method study on correcting yaw error of 500 mm grating blank carriage in real time 期刊论文 Applied Optics, 2015, 卷号: 54, 期号: 13, 页码: 4084-4088 作者: Yang, C.; X. T. Li; H. L. Yu; H. Z. Yu; J. W. Zhu; S. W. Zhang; J. X. Gao; Bayanheshig and Y. G. Tang Adobe PDF(631Kb)  |  收藏  |  浏览/下载:368/99  |  提交时间:2016/07/15 |
| Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate 期刊论文 Aip Advances, 2015, 卷号: 5, 期号: 7, 页码: 10 作者: Yang, S.; Bayanheshig; X. L. Zhao; S. Xing; Y. X. Jiang; N. Wu; Q. B. Jiao; W. H. Li and X. Tan 浏览  |  Adobe PDF(2479Kb)  |  收藏  |  浏览/下载:390/88  |  提交时间:2016/07/15 |