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Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 23, 页码: 41671-41684
作者:  Y. Yin;  L. Liu;  Y. Bai;  Jirigalantu;  H. Yu;  Bayanheshig;  Z. Liu and W. Li
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Design of Ultraviolet High-Resolution Astigmatic Correction Rowland Holographic Grating 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 11
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  N. Wu and T. Zhang
浏览  |  Adobe PDF(1418Kb)  |  收藏  |  浏览/下载:388/120  |  提交时间:2018/06/13
New Measuring Method of Diffraction Efficiency for Concave Grating Based on Fourier Optics Principle 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 4
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  Bayanheshig;  X. F. Yao;  Jirigalantu;  S. W. Zhang and H. L. Yu
浏览  |  Adobe PDF(809Kb)  |  收藏  |  浏览/下载:382/153  |  提交时间:2018/06/13
Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文
Scientific Reports, 2017, 卷号: 7
作者:  Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang;  Y. Song and Q. Lv
浏览  |  Adobe PDF(4562Kb)  |  收藏  |  浏览/下载:303/135  |  提交时间:2018/06/13
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
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Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 31
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song;  X. T. Li;  S. Jiang and N. Wu
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Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig;  H. Z. Yu;  H. L. Yu and Q. B. Jiao
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Study on the Effects and Compensation Effect of Recording Parameters Error on Imaging Performance of Holographic Grating in On-Line Spectral Diagnose 期刊论文
Spectroscopy and Spectral Analysis, 2016, 卷号: 36, 期号: 3
作者:  Jiang, Y. X.;  Bayanheshig;  S. Yang;  X. L. Zhao;  N. Wu and W. H. Li
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Practical method study on correcting yaw error of 500 mm grating blank carriage in real time 期刊论文
Applied Optics, 2015, 卷号: 54, 期号: 13, 页码: 4084-4088
作者:  Yang, C.;  X. T. Li;  H. L. Yu;  H. Z. Yu;  J. W. Zhu;  S. W. Zhang;  J. X. Gao;  Bayanheshig and Y. G. Tang
Adobe PDF(631Kb)  |  收藏  |  浏览/下载:368/99  |  提交时间:2016/07/15
Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate 期刊论文
Aip Advances, 2015, 卷号: 5, 期号: 7, 页码: 10
作者:  Yang, S.;  Bayanheshig;  X. L. Zhao;  S. Xing;  Y. X. Jiang;  N. Wu;  Q. B. Jiao;  W. H. Li and X. Tan
浏览  |  Adobe PDF(2479Kb)  |  收藏  |  浏览/下载:390/88  |  提交时间:2016/07/15