Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Practical method study on correcting yaw error of 500 mm grating blank carriage in real time | |
Yang, C.; X. T. Li; H. L. Yu; H. Z. Yu; J. W. Zhu; S. W. Zhang; J. X. Gao; Bayanheshig and Y. G. Tang | |
2015 | |
发表期刊 | Applied Optics
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卷号 | 54期号:13页码:4084-4088 |
摘要 | We provided a method to correct the yaw error of a 500 mm grating blank carriage in real time, as the yaw error will bring down the quality of wavefront. We designed a structure with double piezoelectric devices to correct the yaw error. At the same time, to evaluate the correcting ability of our structure, we proposed a relative optical testing structure to verify the correcting accuracy by experiments. The experiment result showed that our method can accomplish the correction of yaw error in real time effectively, at the same time guaranteeing the grating quality. (C) 2015 Optical Society of America. |
收录类别 | SCI ; EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/55378 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Yang, C.,X. T. Li,H. L. Yu,et al. Practical method study on correcting yaw error of 500 mm grating blank carriage in real time[J]. Applied Optics,2015,54(13):4084-4088. |
APA | Yang, C..,X. T. Li.,H. L. Yu.,H. Z. Yu.,J. W. Zhu.,...&Bayanheshig and Y. G. Tang.(2015).Practical method study on correcting yaw error of 500 mm grating blank carriage in real time.Applied Optics,54(13),4084-4088. |
MLA | Yang, C.,et al."Practical method study on correcting yaw error of 500 mm grating blank carriage in real time".Applied Optics 54.13(2015):4084-4088. |
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