Practical method study on correcting yaw error of 500 mm grating blank carriage in real time

	Practical method study on correcting yaw error of 500 mm grating blank carriage in real time
	Yang, C.; X. T. Li; H. L. Yu; H. Z. Yu; J. W. Zhu; S. W. Zhang; J. X. Gao; Bayanheshig and Y. G. Tang
	2015
发表期刊	Applied Optics
卷号	54 期号:13 页码:4084-4088
摘要	We provided a method to correct the yaw error of a 500 mm grating blank carriage in real time, as the yaw error will bring down the quality of wavefront. We designed a structure with double piezoelectric devices to correct the yaw error. At the same time, to evaluate the correcting ability of our structure, we proposed a relative optical testing structure to verify the correcting accuracy by experiments. The experiment result showed that our method can accomplish the correction of yaw error in real time effectively, at the same time guaranteeing the grating quality. (C) 2015 Optical Society of America.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55378
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang, C.,X. T. Li,H. L. Yu,et al. Practical method study on correcting yaw error of 500 mm grating blank carriage in real time[J]. Applied Optics,2015,54(13):4084-4088.
APA	Yang, C..,X. T. Li.,H. L. Yu.,H. Z. Yu.,J. W. Zhu.,...&Bayanheshig and Y. G. Tang.(2015).Practical method study on correcting yaw error of 500 mm grating blank carriage in real time.Applied Optics,54(13),4084-4088.
MLA	Yang, C.,et al."Practical method study on correcting yaw error of 500 mm grating blank carriage in real time".Applied Optics 54.13(2015):4084-4088.

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