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Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang
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Establishment and correction of an Echelle cross-prism spectrogram reduction model 期刊论文
Optics Communications, 2017, 卷号: 403
作者:  Zhang, R.;  Bayanheshig;  X. T. Li and J. C. Cui
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Dual-drive long-travel precise positioning stage of grating ruling engine 期刊论文
International Journal of Advanced Manufacturing Technology, 2017, 卷号: 93, 期号: 9
作者:  Wang, J. S.;  Bayanheshig and C. A. Zhu
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Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文
Scientific Reports, 2017, 卷号: 7
作者:  Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang;  Y. Song and Q. Lv
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Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
浏览  |  Adobe PDF(3322Kb)  |  收藏  |  浏览/下载：298/89  |  提交时间：2018/06/13