Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Dual-drive long-travel precise positioning stage of grating ruling engine | |
Wang, J. S.; Bayanheshig and C. A. Zhu | |
2017 | |
发表期刊 | International Journal of Advanced Manufacturing Technology |
卷号 | 93期号:9 |
摘要 | The presented dual-drive long-travel precise positioning stage is employed in grating ruling engine and capable of extended travel and high precision. Based on the characteristic of grating ruling engine, a dual-drive positioning system is developed. The primary positioning stage is an open-loop system and designed to obtain long-travel range. The secondary positioning stage with a control system can guarantee the positioning precision being less than 10 nm. After modeling the fine positioning system, a single-neuron-based PID controller is employed to implement the control system. The experiment results demonstrate that in the long-travel mode, the stage is capable of performing positioning with an extended move range and accuracy being less than 10 nm. Meanwhile, in the short-travel mode, the stage performs positioning with a limited range of 120 mu m and accuracy being less than 7 nm. The main sources of the positioning deviation including clearance, vibration, and the measurement error are analyzed in detail. |
收录类别 | sci ; ei |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/59256 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Wang, J. S.,Bayanheshig and C. A. Zhu. Dual-drive long-travel precise positioning stage of grating ruling engine[J]. International Journal of Advanced Manufacturing Technology,2017,93(9). |
APA | Wang, J. S.,&Bayanheshig and C. A. Zhu.(2017).Dual-drive long-travel precise positioning stage of grating ruling engine.International Journal of Advanced Manufacturing Technology,93(9). |
MLA | Wang, J. S.,et al."Dual-drive long-travel precise positioning stage of grating ruling engine".International Journal of Advanced Manufacturing Technology 93.9(2017). |
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