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Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang
浏览  |  Adobe PDF(1461Kb)  |  收藏  |  浏览/下载：252/74  |  提交时间：2018/06/13
Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 2
作者:  Yang, J.;  R. Zhang;  L. Yin;  C. Sun and T. J. Li
浏览  |  Adobe PDF(1770Kb)  |  收藏  |  浏览/下载：288/90  |  提交时间：2018/06/13
Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 21
作者:  Mi, X. T.;  H. L. Yu;  H. Z. Yu;  S. W. Zhang;  X. T. Li;  X. F. Yao;  X. D. Qi;  Bayinhedhig and Q. H. Wan
浏览  |  Adobe PDF(2137Kb)  |  收藏  |  浏览/下载：365/122  |  提交时间：2018/06/13
Improved generation method utilizing a modified Fourier spectrum for Airy beams with the phase-only filter technique 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 25
作者:  Ling, J. Y.;  Q. Y. Yang;  S. X. Zhang;  Q. Lu;  S. Liu and C. Z. Guo
浏览  |  Adobe PDF(1463Kb)  |  收藏  |  浏览/下载：242/53  |  提交时间：2018/06/13
Beam drift error and control technology for scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 14
作者:  Wang, W.;  Y. Song;  S. Jiang;  M. Z. Pan and Bayanheshing
浏览  |  Adobe PDF(1710Kb)  |  收藏  |  浏览/下载：267/75  |  提交时间：2018/06/13
Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 31
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song;  X. T. Li;  S. Jiang and N. Wu
浏览  |  Adobe PDF(1191Kb)  |  收藏  |  浏览/下载：316/76  |  提交时间：2017/09/11
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig;  H. Z. Yu;  H. L. Yu and Q. B. Jiao
浏览  |  Adobe PDF(1214Kb)  |  收藏  |  浏览/下载：304/64  |  提交时间：2017/09/11
Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Y. X.;  X. D. Qi;  X. T. Li;  H. L. Yu;  S. Jiang;  H. Bayan and L. Yin
浏览  |  Adobe PDF(749Kb)  |  收藏  |  浏览/下载：295/66  |  提交时间：2017/09/11
Improved method to fully compensate the spatial phase nonuniformity of LCoS devices with a Fizeau interferometer 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Q.;  L. Sheng;  F. Zeng;  S. J. Gao and Y. F. Qiao
浏览  |  Adobe PDF(1010Kb)  |  收藏  |  浏览/下载：287/77  |  提交时间：2017/09/11
Diffraction analysis for DMD-based scene projectors in the long-wave infrared 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Han, Q.;  J. Z. Zhang;  J. Wang and Q. Sun
浏览  |  Adobe PDF(860Kb)  |  收藏  |  浏览/下载：222/93  |  提交时间：2017/09/11