Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control

	Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control
	Mi, X. T.; H. L. Yu; H. Z. Yu; S. W. Zhang; X. T. Li; X. F. Yao; X. D. Qi; Bayinhedhig and Q. H. Wan
	2017
发表期刊	Applied Optics
卷号	56 期号:21
摘要	Groove error is one of the most important factors affecting grating quality and spectral performance. To reduce groove error, we propose a new ruling-tool carriage system based on aerostatic guideways. We design a new blank carriage system with double piezoelectric actuators. We also propose a completely closed-loop servo-control system with a new optical measurement system that can control the position of the diamond relative to the blank. To evaluate our proposed methods, we produced several gratings, including an echelle grating with 79 grooves/mm, a grating with 768 grooves/mm, and a high-density grating with 6000 grooves/mm. The results show that our methods effectively reduce groove error in ruled gratings. (C) 2017 Optical Society of America
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59139
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Mi, X. T.,H. L. Yu,H. Z. Yu,et al. Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control[J]. Applied Optics,2017,56(21).
APA	Mi, X. T..,H. L. Yu.,H. Z. Yu.,S. W. Zhang.,X. T. Li.,...&Bayinhedhig and Q. H. Wan.(2017).Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control.Applied Optics,56(21).
MLA	Mi, X. T.,et al."Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control".Applied Optics 56.21(2017).

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