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| Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者: Mi, X.; H. Yu; H. Yu; X. Qi; X. Li and Q. Wan
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| Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7 作者: Wang, W.; Bayanheshig; M. Pan; Y. Song and W. Li
浏览  |   Adobe PDF(993Kb)  |   收藏  |  浏览/下载:291/94  |  提交时间:2018/06/13 |
| Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者: Wang, W.; S. Jiang; Y. Song and Bayanheshig
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| Precision analysis of grating replicated mosaic error based on the principle of fraunhofer 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5 作者: Lu, Y.; X. Qi; H. Yu; X. Li; S. Zhang; S. Jiang and L. Yin
浏览  |   Adobe PDF(1613Kb)  |   收藏  |  浏览/下载:330/113  |  提交时间:2017/09/11 |
| Detection and calculation of mosaic grating error based on wavefront method 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 5 作者: Lu, Y.; X. Qi; X. Mi; S. Jiang; H. Yu; X. Li and L. Yin
浏览  |   Adobe PDF(590Kb)  |   收藏  |  浏览/下载:326/88  |  提交时间:2017/09/11 |
| Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12 作者: Wang, W.; Bayanheshig; Y. Song; S. Jiang and M. Pan
浏览  |   Adobe PDF(1920Kb)  |   收藏  |  浏览/下载:502/91  |  提交时间:2017/09/11 |
| Yaw angle correction of grating line based on single piezoelectric actuator 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 8, 页码: 2039-2046 作者: Li X.-T.; Qi X.-D. ; Yu H.-L.; Gao J.-X.; Feng S.-L.; Bayanheshig
浏览  |   Adobe PDF(1572Kb)  |   收藏  |  浏览/下载:338/90  |  提交时间:2015/04/24 |
| Mechanism of frictional chatter during mechanical ruling grating 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 11, 页码: 3061-3066 作者: Shi G.-F.; L Y.-Y.; Shi G.-Q.; Jiri G.; Xiao W.
浏览  |   Adobe PDF(1426Kb)  |   收藏  |  浏览/下载:304/84  |  提交时间:2015/04/24 |
| Influence of running accuracy of ruling carriage system on grating spectrum performance 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2674-2682 作者: Yang C.; Yu H.-L.; Feng S.-L.; Li X.-T.; Qi X.-D. ; Jiang S.; Tang Y.-G.
浏览  |   Adobe PDF(1639Kb)  |   收藏  |  浏览/下载:376/141  |  提交时间:2015/04/24 |